Middle hipims high power impulse magnetron sputtering from dr. Oopic simulation of a cylindrical magnetron glow discharge m. Pdf the operation of any magnetrontype sputtering system is based on using of. First magnetron tube was invented in 1940 at englands university by john randall and harry boot. Its working principle is based on the interaction between electron stream and magnetic field. The threads may be removable from the target, enabling efficient assemblydisassembly and recycling. Our cylindrical magnetron is constructed for studying basics of plasma physics.
The cathode and filament are at the center of the tube and are supported by the filament leads. Report hull cut off equation electron motion in cylindrical magnetron please fill this form, we will try to respond as soon as possible. Cylindrical magnetron sputtering cms of coatings for wear life extension in large caliber cannons gregory n. Cylindrical magnetrons we can offer you rotating cylindrical magnetron assembly that is compact, economical, and lightweight. Magnetron is plasmachemical device widely used for surface treatment, etching or sputtering of thin films. In this design the oscillation is created by the physical shape of the anode, rather than external circuits or fields. Scheme of the region used for 2d pic model of discharge in cylindrical magnetron is depicted in figure 2. Cylindrical magnetron sputtering system free patents online. A narrow slot runs from each cavity into the central portion of the tube dividing the. Microwave engineering pdf notes mwe notes pdf smartzworld. Satellite power system sps magnetron tube assessment study william c. Pdf a study of the electron energy distribution function. The inspiration for the beginning of the research is an attempt to solve the problem of increasing the operational durability of heavily loaded elements of chemical installations, parts of. The cavity magnetron is a highpowered vacuum tube that generates microwaves using the interaction of a stream of electrons with a magnetic field while moving past a series of open metal cavities cavity resonators.
Computer simulation of relativistic multiresonator cylindrical magnetrons by heiwai chan chiping chen onald c. On the central axis is a hollow cylindrical cathode. Permission is granted to copy, distribute andor modify this document under the terms of the gnu free documentation license, version 1. The table shows that even these conservative estimates lead to a reduction in material cost by a factor of five. A thick cylindrical cathode is present at the center and a cylindrical block of copper, is fixed. It is a low cost potential coating technology for the production of large area uniform nanocomposite thin films exhibiting plasmonic properties. Obtaining the crn coating inside the barrel using a. Electrons pass by the openings to these cavities and cause microwaves to oscillate within, similar to the way a whistle produces a tone when excited by an air stream blown past its. A study of plasma polymerization of cyclopropylamine in a lowpressure cylindrical magnetron reactor is presented. Angstrom sciences has developed cylindrical magnetron technology that embody.
Aug 01, 2014 the shape of inverted cylindrical magnetrons makes them ideal for coating a variety of optical components having non. The threshold iris width in this case corresponds to 0. Report hull cut off equation electron motion in cylindrical magnetron please fill this form, we. Design and fabrication of a dc cylindrical magnetron.
Improvement of coating deposition and target erosion. Cavity magnetron or magnetron oscillator in microwave. The anode of a magnetron is fabricated into a cylindrical solid copper block. Jns 3 20 443 451 deposition of alcu multilayer by double targets cylindrical dc magnetron sputtering system p. Satellite power system sps magnetron tube assessment study.
Robust mechanical and electrical construction corrosion resistant and modular magnet bars optimized magnetics to maximize bulk target erosion and deposited film uniformity profiled magnetics to reduce the separation distance between adjacent racetracks. The device consists of two copper cylinders with 1. Inverted cylindrical magnetron sputtering, vakuum in. Experimental procedure figure 1 shows a schematic of the cylindrical magnetron sputter source and experimental apparatus. Film thickness variation in a cylindrical magnetron deposition device. The magnetron is called as cavity magnetron because the anode is made into resonant cavities and a permanent magnet is used to produce a strong magnetic field, where the action of both of these make the device work. An inverted cylindrical magnetron device for a continuous allside deposition of metal films onto wires and temperaturesensitive synthetic fibres was designed and tested.
Study of dc cylindrical magnetron by langmuir probe. Magnetron zero mode, magnetron pi mode, magnetron mode. Cylindrical magnetron sputtering cms of coatings for. Magnetron mi 29g 29 of the old russian radar bar lock the magnetron is a highpowered vacuum tube, that works as selfexcited microwave oscillator. The cylindrical magnetron sputter source has a cylindrical cathode inner diameter. High power transfer system form magnetron to linac. I made an vacuum chamber jar devise and now i use the plasma discharge. Cylindrical magnetron presentations to view a presentations pdf listed below click on the. An object oriented particleincell model of a plasma glow discharge in a cylindrical magnetron cleaning device has been developed to provide guidance in developing a novel in situ surface conditioning technique. Description download hull cut off equation electron motion in cylindrical magnetron comments. This paper reports the synthesis and feasibility of reliably reproduced high quality of auvo2 by icms.
In this video, i have explained following topics regarding magnetron oscillator. Ultimately it depends on your application, but there are a lot of reasons to consider an icm. This optimizes uniformity while minimizing the rate loss due to uniformity shielding. Cylindrical traveling wave magnetron hull cutoff and hartree conditions, modes of resonance and plmode operation, separation of pimode. Uniformity control for rotating cylindrical magnetrons. Perfectly matched modelbased tangential maximum and normal zero crossing curves to create a balanced magnetron. Magnetron demonstration simple and easy to built a dc magnetron with my own high voltage power supply device.
Due to symmetry o f the discharge area it is possible to place re. Cylindrical magnetron sputtering source hewlettpackard company. Cylindrical magnetron sputtering cathodes are described in a series of patents by penfold and thornton issued in the mid1970s and were among the first magnetrons developed. These multicavity devices may be used in radar transmitters as either pulsed or cw oscillators at frequencies ranging from approximately 600 to 95,000 megahertz. Oopic simulation of a cylindrical magnetron glow discharge. The cathode is without features extending inwards thereof at either end such that the target may be axially removed from or installed into the cathode from either end. Us55914a apparatus for affixing a rotating cylindrical. Davidson february, 1990 this research was supported in part by sdioist under the managment of harry diamond laboratories, in part by the department of energy high energy physics division, and in part by the naval surface warfare center. In addition, combining dual cathode mid frequency unbalanced magnetron sputtering with the cylindrical geometry produces a unique source for ion enhanced deposition on planar substrates located at the ends of the. At the opposite extreme, with no field, the electrons are free to flow straight from the cathode to the anode. On tomonagas theory of splitanode magnetrons springerlink. The magnetron is a device of essentially cylindrical symmetry see illustration. Simulation of the reactive process article pdf available in journal of applied physics 10711.
Particle contamination formation in magnetron sputtering processes gary s. Cylindrical magnetron deposition rf power supply target magnetron coating gun barrel vacuum chamber bias power supply magnetron power supply rectangular magnets left rfplasma enhanced cylindrical magnetron sputtering experiments at swri. Magnetron article about magnetron by the free dictionary. However, the geometry of inverted cylindrical magnetrons creates an acute hidden anode problem that makes pulsed dc reactive sputtering ineffective in these devices. Onyxrevolution cylindrical magnetron and magnet bar retrofit. Jan 12, 1993 a system as recited in claim 4, wherein there are at least two cylindrical magnetron sputtering systems, and wherein said elongate substrate, as it moves through said vacuum chamber from said supply reel to said takeup reel, passes through one of said at least two cylindrical magnetron sputtering systems, then through one of said at least one. Us4179351a us05721,740 us72174076a us4179351a us 4179351 a us4179351 a us 4179351a us 72174076 a us72174076 a us 72174076a us 4179351 a us4179351 a us 4179351a authority us united states prior art keywords cathode magnet magnetron sputtering means sputtering source prior art date 19760909 legal status the legal status is an assumption and is not a legal conclusion. A magnetron is a high power microwave oscillator in which the potential energy of an electron cloud near the cathode is converted into r. The magnetron is turned into a metal plasma source by using very high peak power density of 1 kwcm 2. Magnetron operating principles magnetrons are basically diodes with a cylindrical cathode inserted coaxially in a cylindrical anode, which consists of a set of resonant cavities 12 forming a slow wave.
Oct 29, 2018 in this video, i have explained following topics regarding magnetron. Isoflux is the world leader in inverted cylindrical magnetron icm sputtering. The magnetron tube works on dc direct current power. Static deposition profile for a single cylindrical magnetron efficiency. Po2049 long cylindrical magnetron with dynamic magnetic field. Depla 1 1 ugent, gent, belgium 2 vito, mol, belgium. Jun 30 general 28568 views 6 comments on principle and operation of magnetrons and travelling wave tube magnetron magnetron is a grouping of a simple diode vacuum tube together with built in cavity resonators and an exceptionally powerful magnet. Aja has developed the unique tr53 concentric triangular magnetron sputtering source. Several configurations of magnetron sputtering sources and basic physical principle are described in. An apparatus to releasably affix a rotating cylindrical magnetron target to a spindle utilizes a threaded spindle collar engaging threads on the outside surface of the target, with a single watertovacuum seal located at the target and spindle interface. Robust mechanical and electrical construction corrosion resistant and modular magnet bars optimized magnetics to maximize bulk target erosion and deposited film uniformity profiled magnetics to reduce the separation distance between adjacent racetracks vapor phase efficiency. Due to symmetry of the discharge area it is possible to place re. You must be logged in to scitation to activate your free access. Both electrodes are cylindrical in shape and cathode is surrounded by the anode.
Magnetron oscillator cavity magnetron internal structure 3. Placement of cylindrical magnets inside of a cylindrical cathode comprising a source of depositing material for sputter depositing of the material upon the interior surface of a substantially cylindrical workpiece, results in improved deposition rates, low power requirements, low workpiece temperatures and purity and cohesiveness in the deposited layer of material. A study of the electron energy distribution function in the cylindrical magnetron discharge in argon and xenon. A model for magnetron sputter deposition using a rotating cylindrical magnetron k.
The model tracks the trajectories of particles by solving the equations of motion and the electrostatic field equations. In search for the limits of rotating cylindrical magnetron. In addition, combining dual cathode mid frequency unbalanced magnetron sputtering with the cylindrical geometry produces a unique source for ion enhanced deposition on planar substrates located at the. To view a presentations pdf listed below click on the pdf icon or the title of the file. The lower target cost for the cylindrical magnetron arises from the ability to use rolled sheets that slip into place without bonding, thereby simplifying the fabrication. Reactive cylindrical magnetron deposition ofreactive. A model for magnetron sputter deposition using a rotating. Langmuir probe diagnostics of dc cylindrical magnetron.
Plasma polymerization of cyclopropylamine in a lowpressure. In addition to lower material costs, cylindrical magnetrons. Electronic theory of the cylindrical magnetron sciencedirect. The outer surface of the cathode carries electronemitting materials, primarily barium and strontium oxides in a nickel matrix. Cylindrical magnetron presentations angstrom sciences.
Cylindrical magnetrons with rotating cathodes have found wide application in the thinfilm coating deposition technologies owing to a higher degree of the target utilization and used power level as compared with planar magnetrons. A magnetic coil mounted around the outer cylinder generates an axial magnetic. They sputter from the surface of approximately cylindrical targets and can be built in either the post or inverted geometry to sputter off of the outside or inside of the. The great advance in magnetron design was the resonant cavity magnetron or electronresonance magnetron, which works on entirely different principles. Dec 18, 1979 cylindrical magnetron sputtering source. The publication presents the results of own research on pvd technology using a cylindrical magnetron with a plasma cathode moving inside cylindrical ducts. In this contribution, the cavity coatings concept with hipims is explained. In cylindrical chamber configurations where substrates are fixed to the periphery of a rotating table or spider, the ideal sputter source shape is triangular. Pdf film thickness variation in a cylindrical magnetron.
Thermochromic nanocrystalline auvo composite thin films. Now, angstrom sciences has created a compact, lightweight, and economical cylindrical magnetron specifically designed to offer these same advantages to flat panel display, solar cell, and web coating. Cylindrical magnetrons have long been trusted in the glass coating industry to create uniform thin films while maximizing target utilization. This process can produce coatings with new tribological. The shape of inverted cylindrical magnetrons makes them ideal for coating a variety of optical components having non. Cathode sputtering apparatus on the magnetron principle with a hollow cathode and a cylindrical target. Deposition of niobium and other superconducting materials. Cylindrical magnetrons were proposed by penfold and. The aim of this work was to increase the efficiency of cylindrical magnetrons. Cavity magnetron depend upon the interaction of electrons with a rotating electromagnetic eld of constant angular velocity. The anode has several cavities that open into interaction space. A dc cylindrical magnetron sputtering device is designed and its characteristics are studied. Ac reactive sputtering with inverted cylindrical magnetrons. Cylindrical magnetron angstrom science cylindrical.
Thickness and composition uniformity, desired film properties. Microwave transfer and heat conduction are schematized. The metal flux from a rotating cylindrical magnetron. Therefore, we have built a dualcathode inverted cylindrical magnetron that can be driven with midfrequency power. The first section will discuss methods and results for tuning a rotatable cylindrical magnetron in order to meet a uniformity specification the 2 nd section will discuss some of the criteria which should be understood prior to implementing a rotating cylindrical magnetron.
The cavity magnetron is a highpowered vacuum tube that generates microwaves using the. Both experimental and numerical approaches are used to investigate thin film growth mechanisms and polymer film properties depending on the magnetic field strength. Keyholes magnetron design and multiphysics simulation. Remarkable advances have been made in recent years in the science and technology of thin film processes for deposition and etching. A cylindrical magnetron having a cylindrical cathode surrounding a cylindrical target. Pdf hull cut off equation electron motion in cylindrical. Actually, cathodes are the cavities which are in cylindrical shapes also. Us4179351a cylindrical magnetron sputtering source. The magnetron is classed as a diode because it has no grid. Plasma polymerization of cyclopropylamine in a low. Crossed electron and magnetic fields are used in the magnetron to produce the highpower output required in radar equipment. May 22, 2018 in this video, i have explained following topics regarding magnetron oscillator. May 23, 20 as stated above, a magnetron tube is constructed of a vacuum tube having two electrodes i. The space between cathode and anode is called interaction space.
The filament leads are large and rigid enough to keep the cathode and filament structure fixed in position. Particle contamination formation in magnetron sputtering. A system with two cylindrical, movable magnetrons was set up with custom magnetrons small enough to be inserted. Calculation the anodevoltage of the anode voltage v, is obtained by integrating the field, at a certain instant t, from cathode t o anode, and the field itself results from eq. Weissb materials research corporation, 200 route 303, north congers, new york 10920 federico sequedac and. The magnetron is a vacuum tube which is used in the generation of microwaves of high power. The magnetron is a highpowered vacuum tube that works as a selfexcited microwave oscillator. Electronic theory of the cylindrical magnetron v, where 9t,to is a function of the time of emission to and of time t. Suppression of highenergy backscattered particles in. Recent developments in inverted cylindrical magnetron. They sputter from the surface of approximately cylindrical targets and can be built in either the post or inverted geometry to sputter off of the outside or inside of the target, respectively. Physical construction of a magnetron the magnetron is classed as a diode because it has no grid. Numerical studies and optimization of magnetron with diffraction. E xperimental data can be compared and verified by results obtained from model.
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